電容式硅微加速度計(jì)變換方程的研究

研究了利用硅薄片為敏感元件的電容式加速度計(jì),加速度計(jì)的懸臂梁與慣性質(zhì)量塊是一
個整體結(jié)構(gòu),可以消除元件彈性連接的不完善性,而且極板間隙中空氣相對介電常數(shù)εr 的高穩(wěn)定性是這種電容式傳感器的優(yōu)點(diǎn)之一。給出了敏感元件的實(shí)際彎曲函數(shù),分析了其變換方程及非線性。研究表明,在設(shè)計(jì)電容式硅微加速度計(jì)時,只要間隙調(diào)制深度在- 0. 5～ + 0. 5 ,加速度計(jì)的變換函數(shù)基本滿足線性,得到的變換方程可以作為合理選擇電容式加速度計(jì)的電極結(jié)構(gòu)參數(shù)的理論依據(jù)。
關(guān)鍵詞:微加速度計(jì);變換方程;非線性誤差
　　Abstract :Capacitance silicon microstructure accelerometer was studied. The cantilever beam and inertial mass of ac2 celerometer were joined together to reduce the shortcoming of the elements joining. The highly stationality of air relative dielectric constant in electrode plate clearance is one of the advantages of the capacitance sensor. Transform equation and its
nonlinearity were analyzed ,and the bend function of sensitive element was given. Studies results indicate that the transform function of accelerometer was linearity as long as the depth of clearance modulation was kept - 0. 5 and + 0. 5. It renders a theoretic bas for choosing rational electrode configuration parameters.
Key Words :Microstructure Accelerometer ; Transpositional Equation ;Nonlinearity Error