基于壓電驅(qū)動的納米級精密定位系統(tǒng)的研究

利用壓電陶瓷致動器作為驅(qū)動元件設(shè)計了X 2Y 兩自由度精密定位工作臺, 并利用有限元分析法對機(jī)構(gòu)進(jìn)行了優(yōu)化設(shè)計, 采用電阻應(yīng)變片作為微位移檢測傳感器, 在此基礎(chǔ)上設(shè)計了閉環(huán)控制器, 該控制器包括壓電陶瓷驅(qū)動單元、微位移傳感器檢測單元和中央處理單元, 最后利用P ID 控制法進(jìn)行了閉環(huán)控制實驗研究。實驗結(jié)果表明, 本系統(tǒng)具有較好的控制品質(zhì)和優(yōu)異的動態(tài)性能, 在對10 Lm ×10 Lm 兩自由度工作臺的控制中, 閉環(huán)控制精度
達(dá)10 nm , 階躍響應(yīng)的穩(wěn)定時間小于8 m s。
關(guān)鍵詞: 壓電陶瓷致動器; 精密定位; 閉環(huán)控制
Abstract: Based on p iezo actuato r, a p recision X 2Y stage has been designed by using the finite elements method. A clo sed2loop cont ro ller,w h ich used st rain gauge as m icro2disp lacement senso r has also been considered. The cont ro ller includes drive2unit, co llect ion unit deals w ith m icro2disp lacement senso r, and co re p rocess unit. Ex2 perimentat ion has been carried out using P ID cont ro lmethod. The result show s that the system has good cont ro l quality and dynam ic response. The po sit ion accuracy ach ieves 10 nm w h ile w e cont ro l the X 2Y stage w ith 10 Lm× 10 Lm t ravel range. To a step response, system reaches stabilizat ion w ith in 8 m s.
Key words: p iezo actuato r; p recision po sit ioning; clo sed2loop cont ro l