侵徹武器用MEMS大g值加速度計(jì)

侵徹武器穿入地面等堅(jiān)硬物質(zhì)的加速度可達(dá)重力加速度的2 萬(wàn)倍至幾十萬(wàn)倍， 要求所用加速度傳感器既能抗擊該工作環(huán)境， 又能識(shí)別沖擊與鉆入的整個(gè)過(guò)程。美國(guó)侵徹武器用MEMS 大g 值加速度計(jì)屬電容傳感器， 其工作原理采用2 個(gè)電參數(shù)完全相同的電容，1 個(gè)作檢測(cè)電容，1 個(gè)作參考電容， 將被測(cè)加速度值的變化轉(zhuǎn)換成電容量的變化而實(shí)現(xiàn)。該加速度計(jì)由結(jié)構(gòu)單元和信號(hào)處理電路組成。實(shí)驗(yàn)結(jié)果表明， 尚需對(duì)2 組成部分進(jìn)一步集成， 對(duì)機(jī)械靜電阻尼進(jìn)行優(yōu)化， 對(duì)封裝深入研究。
關(guān) 鍵 詞 ： 大g 值加速度計(jì)； 電容傳感器； 微機(jī)電系統(tǒng)（MEMS）； 侵徹武器
Abstract: The acceleration of penetrator weapon when it irrupts into ground firm substance is twenty thousand times to hundreds thousand of times of gravity acceleration, the acceleration sensor that was required not only oppugns work circumstance but also identifies the process of concussion and irruption. High-g accelerometer in MEMS for USA penetrator weapon pertains to capacitance sensor, its operational principle is that 2 capacitances with same electric parameter are used, one used as test, and another used as reference, and that the change of acceleration value tested is transformed in the change of capacitance quantity. High-g accelerometer consists of structure unit and the signal processing circuit. The tested results show that 2 parts of structure unit and the signal processing circuit should be integrate d and the mechanical static damp is optimized, the encapsulation is researched.
Key Words: High-G Accelerometer; Capacitance sensor; MEMS; Penetrator Weapon