二維FDTD法互連線分析的非均勻網(wǎng)格實現(xiàn)

用二維時域有限差分法計算高速集成電路有耗互連線頻變參數(shù)時，如采用均勻細(xì)網(wǎng)格劃分整個仿真空間，微米級的互連線結(jié)構(gòu)和趨膚深度會導(dǎo)致計算機(jī)內(nèi)存空間占用太大，計算速度很低?；诖耍撐奶岢鲆环N結(jié)合理想電壁截斷邊界條件的漸變非均勻網(wǎng)格劃分技術(shù)，其優(yōu)點是簡單方便，編程計算極易實現(xiàn)，并且可以在保證計算精度的前提下明顯提高電磁仿真的效率。
關(guān) 鍵 詞 二維時域有限差分法; 互連線; 漸變非均勻網(wǎng)格; 趨膚深度

Abstract The traditional FDTD discretization of Maxwell equations in which all cells are equal is proved not to be efficient in many cases. In order to conform to fine scale geometric details of interconnects without increasing the overall mesh size and without losing computational accuracy, graded mesh technique combined with perfectly electric conducting boundary in 2D FDTD algorithm is proposed in this paper. Numerical experiments verify its accuracy and efficiency.
Key words 2D finite-difference time-domain algorithm; interconnects; graded mesh;
skin depth